Back to results
US 2012/0236318 A1Published application
Inspecting apparatus, three-dimensional profile measuring apparatus, and manufacturing method of structure
AssigneeNikon Corporation
InventorHiroshi AOKI
Life of this patent
Estimating the term…
Abstract
An aspect of an inspecting apparatus includes a profile measuring part measuring a profile of an object surface and an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface from mutually different plurality of directions.
Claims36
An inspecting apparatus, comprising:
- a profile measuring part measuring a profile of an object surface;
- and
- an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface from mutually different plurality of directions.
A three-dimensional profile measuring apparatus, comprising:
- a profile measuring part measuring a profile of an object surface;
- and
- an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface from mutually different plurality of directions.
An inspecting apparatus, comprising:
- a profile measuring part measuring a profile of an object surface;
- an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface;
- and
- a controlling part setting a measuring object of the profile measuring part on the object surface based on the light intensity distribution being detected by the image detecting part.
1 more element
A three-dimensional profile measuring apparatus, comprising:
- a profile measuring part measuring a profile of an object surface;
- an image detecting part detecting a light intensity distribution of the object surface by illuminating the object surface;
- and
- a controlling part setting a measuring part of the profile measuring part on the object surface based on the light intensity distribution being detected by the image detecting part.
1 more element
Dependencies are inferred from the claim text.