Method and apparatus for determining a shape of an optical test surface

Abstract

A method of determining a shape of an optical test surface (14) comprises the steps: adapting a wavefront of a measuring beam (30) to a desired shape of the optical test surface (14) by means of adaptation optics (20) and interferometric measurement of the shape of the optical test surface (14) by means of the adapted measuring beam, irradiating the adapted measuring beam at different angles of incidence onto the optical test surface and respectively measuring the wavefront of the measuring beam after the interaction of the latter with the optical test surface (14), establishing the effect of the adaptation optics (20) upon the interferometric measurement result from the wavefronts measured for the individual angles of incidence, and determining the shape of the optical test surface (14) by removing the established effect of the adaptation optics (20) from the interferometric measurement result.

Dependencies are inferred from the claim text.