Apparatus for detecting position and depth and a method thereof

Abstract

The present invention provides an apparatus for detecting the position and depth of a Device Under Test (DUT) having a surface and a method thereof. The apparatus comprises an electrically-controlled swing element whose swing angle is controlled by an electrically-driven actuator, a light source whose light beam is redirected to the surface by the electrically-controlled swing element to form a light point, an optical system configured to receive the projection information of the light point, a storage unit configured to store the default information of the light point projected onto a default plane (DP) and a computation unit for calculating the depth information of the DUT according to the projection information and the default information.

Dependencies are inferred from the claim text.