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US 2012/0236282 A1Published application
Imaging optical system
AssigneeCarl Zeiss SMT GmbH
InventorHans-Juergen Mann
Life of this patent
Estimating the term…
Abstract
The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such im-aging optical systems, methods of using such projection exposure installa-tions, and components made by such methods.
Claims31
An imaging optical system, comprising:
- a plurality of mirrors configured to image an object field in an object plane into an image field in an image plane, at least one of the mirrors having a through-hole configured so that imaging light can pass therethrough,
- wherein the imaging optical system has a reduction magnification level of at least four times.
A projection exposure installation, comprising:
- an imaging optical system comprising a plurality of mirrors configured to image an object field in an object plane in an image field in an image plane, at least one of the mirrors having a through-hole configured so that imaging light can pass therethrough, and the imaging optical system having a reduction magnification level of at least four times;
- and
- a lens system configured to direct illumination light to the object field of the imaging optical system,
- wherein the projection exposure installation is a microlithography projection exposure installation.
1 more element
A method, comprising:
- using a projection exposure installation according to produce a microstructure on a wafer, the projection exposure installation comprising:
- an imaging optical system comprising a plurality of mirrors configured to image an object field in an object plane in an image field in an image plane, at least one of the mirrors having a through-hole configured so that imaging light can pass therethrough, and the imaging optical system having a reduction magnification level of at least four times;
- and
- a lens system configured to direct illumination light to the object field of the imaging optical system.
1 more element
Dependencies are inferred from the claim text.