Droplet-discharging-head manufacturing apparatus, droplet-discharging-head manufacutring method, droplet discharging head, droplet discharging device, and printing apparatus

A droplet-discharging-head manufacturing apparatus that manufactures a droplet discharging head that includes a piezoelectric element formed by a lower electrode, a piezoelectric body as a laminated body of a plurality of ferroelectric layers, and an upper electrode laminated in this order, the droplet-discharging-head manufacturing apparatus comprising:

• a film forming unit that forms a ferroelectric precursor film on a silicon wafer having a conductive layer formed thereon;
• a heating layer that heats and bakes the ferroelectric precursor layer to form the ferroelectric layer;
• a cooling unit that cools the ferroelectric layer;
• a conveying unit that conveys a plurality of the silicon wafers one by one;
• and
• a control unit that controls the film forming unit, the heating unit, the cooling unit, and the conveying unit so as to repeat a series of processes including formation of the ferroelectric precursor layers by the film forming unit, heating of the ferroelectric precursor layers by the heating unit, and cooling of the ferroelectric layers by the cooling unit, for a predetermined number of times for each of the silicon wafers.