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US 2012/0235779 A1Published application
Micro coil apparatus and manufacturing methods therefor
AssigneeMaradin Technologies Ltd.
InventorsAdi BARAM, Matan Naftali, Sharon Hornstein, Inbal Herer, Menashe Yehiel
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Abstract
A method for manufacturing a conductive coil, the method comprising using a semiconductor fabrication process (e.g. TSV) to manufacture a coil, typically a planar spiral conductive coil.
Claims42
An electric coil device comprising:
- a spiral comprising a plurality of electro-conductive turns and an isolation layer between the turns, the isolation layer comprising a spiral trench of varying width formed of a surrounding electrically isolating bulk, the electro-conductive turns comprising an electro-conductive material at least partly filling said spiral trench;
- and
- connection feeds in and out of the spiral.
A method for manufacturing an electric coil device, the method comprising:
- providing a spiral comprising a plurality of electro-conductive turns and an isolation layer between the turns, including forming the isolation layer by forming a spiral trench of a surrounding electrically isolating bulk, and forming the electro-conductive turns by at least partly filling said spiral trench with an electro-conductive material;
- and
- providing connection feeds in and out of the spiral.
Dependencies are inferred from the claim text.