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US 2012/0235647 A1Published application
Sensor with energy-harvesting device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTien-Kan CHUNG, Wen-Chuan TAI, Yao-Te HUANG, Hsin-Ting HUANG, Shang-Ying TSAI, Chang-Yi YANG, Chia-Ming HUNG
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Abstract
In some embodiments of the present disclosure, a sensor comprises a substrate, a sensor element and an energy-harvesting device. The sensor element comprises a plate, and the plate is moveable with respect to the substrate. The energy-harvesting device is formed on the plate of the sensor element.
Claims20
A device comprising:
- a substrate;
- a sensor element connected to the substrate and comprising a plate, the plate moveable with respect to the substrate;
- and
- an energy-harvesting device, the energy-harvesting device formed on the plate of the sensor element.
1 more element
A system comprising:
- a substrate;
- a plate moveable with respect to the substrate, the moveable plate adapted to move in response to an environment variable;
- an energy harvesting device formed on the moveable plate;
- and
- a controller adapted to power the sensor system using at least a portion of energy harvested by the energy-harvesting device.
2 more elements
A method of fabricating a device comprising:
- forming a moveable plate over a substrate;
- forming an energy harvesting coil in the moveable plate;
- and
- forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.
1 more element
Dependencies are inferred from the claim text.