MEMS acoustic pressure sensor device and method for making same
AssigneePixArt Imaging Incorporation, R.O.C.
InventorChuan-Wei Wang
Life of this patent
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Abstract
The present invention discloses a Micro-Electro-Mechanical System (MEMS) acoustic pressure sensor device and a method for making same. The MEMS device includes: a substrate; a fixed electrode provided on the substrate; and a multilayer structure, which includes multiple metal layers and multiple metal plugs, wherein the multiple metal layers are connected by the multiple metal plugs. A cavity is formed between the multilayer structure and the fixed electrode. Each metal layer in the multilayer structure includes multiple metal sections. The multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.
Claims15
A MEMS acoustic pressure sensor device, comprising:
- a substrate;
- a fixed electrode provided on the substrate;
- and
- a multilayer structure including:
- multiple metal layers;
- and
- multiple metal plugs connecting the multiple metal layers;
- wherein a cavity is formed between the multilayer structure and the fixed electrode, and each metal layer in the multilayer structure includes multiple metal sections, wherein the multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.
A method for manufacturing a MEMS acoustic pressure sensor device, comprising:
- providing a substrate;
- forming a fixed electrode on the substrate;
- forming at least one sacrificial layer;
- forming multiple metal layers on the sacrificial layer, the multiple metal layers having multiple metal sections, respectively;
- and
- forming multiple metal plugs for connecting the multiple metal layers to form a multilayer structure, wherein the multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave;
- and
- removing the sacrificial layer to form a cavity.
Dependencies are inferred from the claim text.