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US 2012/0235161 A1Published application
Group iii nitride templates and related heterostructures, devices, and methods for making them
OwnerTanya Paskova, Edward A. Preble +3inventors
InventorsTanya Paskova, Edward A. Preble, Terry I. Clites, Andrew D. Hanser, Keith R. Evans
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Abstract
A templated substrate includes a base layer, and a template layer is disposed on the base layer and having a composition including a single-crystal Group III nitride. The template layer includes a continuous sublayer on the base layer and a nanocolumnar sublayer on the first sublayer, wherein the nanocolumnar sublayer includes a plurality of nano-scale columns.
Claims29
A templated substrate, comprising:
- a base layer;
- and
- a template layer disposed on the base layer and having a composition including a single-crystal Group III nitride, the template layer comprising a continuous sublayer on the base layer and a nanocolumnar sublayer on the first sublayer, wherein the nanocolumnar sublayer comprises a plurality of nano-scale columns,
- wherein the base layer has an off-cut orientation.
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A method for fabricating a templated substrate, the method comprising:
- growing a single-crystal Group III nitride-inclusive template layer on a base layer by vacuum deposition, wherein growing comprises:
- forming a continuous sublayer on the base layer;
- forming a nanocolumnar sublayer on the continuous sublayer, wherein the nanocolumnar sublayer comprises a plurality of nano-scale columns;
- and
- controlling a strain value of the template layer by controlling a parameter selected from the group consisting of a thickness to which the template layer is grown, an off-cut orientation of the base layer, and a composition of the base layer.
2 more elements
Dependencies are inferred from the claim text.