Drive laser delivery systems for euv light source
AssigneeCymer, Inc.
InventorAlexander I. Ershov
Life of this patent
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Abstract
An EUV light source is disclosed herein which may comprise a droplet generator producing a stream of target material droplets, a first optical gain medium amplifying light on a first beam path without a seed laser providing a seed laser output to the first beam path, a second optical gain medium amplifying light on a second beam path without a seed laser providing a seed laser output to the second beam path, and a beam combiner combining light from the first beam path and the second beam path for interaction with a target material droplet to produce EUV light emitting plasma.
Claims20
An EUV light source comprising;
- a droplet generator producing a stream of target material droplets;
- a first optical gain medium amplifying light on a first beam path without a seed laser providing a seed laser output to the first beam path;
- a second optical gain medium amplifying light on a second beam path without a seed laser providing a seed laser output to the second beam path;
- and
- a beam combiner combining light from said first beam path and said second beam path for interaction with a target material droplet to produce EUV light emitting plasma.
An EUV light source comprising;
- a first optical gain medium amplifying light on a first beam path;
- a second optical gain medium amplifying light on a second beam path;
- a first beam combiner diverting a portion of light from the first beam path to a second beam path and through the second optical gain medium;
- and
- a second beam combiner combining light on said first beam path and said second beam path to irradiate a target material and generate EUV light emitting plasma.
A method for generating EUV light, said method comprising the steps of:
- amplifying light on a first beam path with a first optical gain medium;
- amplifying light on a second beam path with a second optical gain medium;
- diverting a portion of light from the first beam path to a second beam path and through the second optical gain medium;
- and
- combining light on said first beam path and said second beam path to irradiate a target material and generate EUV light emitting plasma.
Dependencies are inferred from the claim text.