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US 2012/0235039 A1Published application
Mems sensor
AssigneePioneer Corporation
InventorsTakanori Maeda, Kenjiro Fujimoto, Takahiro Kawano, Atsushi Onoe
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Abstract
A MEMS sensor has a frame portion 2 formed in a rectangular frame shape and a convexoconcave shaped membrane 3 that is constructed within the frame portion 2, the convexoconcave shape of the membrane 3 extend to two direction where a concave and a convex are orthogonal to each other, and square concave portions 3a and square convex portions 3b are disposed in a web shape within a whole in-plane area of the membrane 3.
Claims5
A MEMS sensor comprising:
- a frame portion formed in a polygonal frame shape;
- and
- a membrane having sensitivity as sensor that is constructed within the frame portion and a peripheral portion thereof connected at least on an inner surface of the frame portion is formed in a plurality of convexoconcave shapes, and the MEMS sensor constituting each element of an sensor array.
Dependencies are inferred from the claim text.