Transmission Electron Microscope and Sample Observation Method

A transmission electron microscope comprising:

• an electron gun that irradiates a sample with an electron beam;
• an irradiation-side annular aperture that is located between the electron gun and the sample and has a ring-shaped slit that causes the electron beam emitted by the electron gun to be formed in a hollow cone shape;
• a focusing lens that is located between the irradiation-side annular aperture and the sample and focuses, on the sample, the electron beam that has passed through the irradiation-side annular aperture;
• an electron detector that detects electrons that are passed through the sample and scattered;
• a first detection-side annular aperture that is located between the electron detector and the sample and has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample;
• and
• a second detection-side annular aperture that is located between the first detection-side annular aperture and the electron detector and has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons that have passed through the first detection-side annular aperture.

A transmission electron microscope comprising:

• an electron gun that irradiates a sample with an electron beam;
• an electron detector that has an annular light receiving portion and detects electrons that have passed through the sample and have been scattered;
• and
• a detection-side annular aperture that is located between the electron detector and the sample and has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample.

A transmission electron microscope comprising:

• an electron gun that irradiates a sample with an electron beam;
• an irradiation-side annular aperture that is located between the electron gun and the sample and has a ring-shaped slit that causes the electron beam emitted by the electron gun to be formed in a hollow cone shape;
• a focusing lens that is located between the irradiation-side annular aperture and the sample and focuses, on the sample, the electron beam that has passed through the irradiation-side annular aperture;
• an electron detector that has an annular light receiving portion and detects electrons that have passed through the sample and have been scattered;
• and
• a detection-side annular aperture that is located between the electron detector and the sample and has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample.

A sample observation method comprising the steps of:

• causing an annular aperture to limit an electron beam and irradiating a sample with the electron beam formed in a hollow cone shape;
• causing a plurality of annular apertures to limit electrons scattered from the sample;
• and
• detecting scattered electrons that have passed through the plurality of annular apertures.

A sample observation method comprising the steps of:

• causing an annular aperture to limit an electron beam and irradiating a sample with the electron beam formed in a hollow cone shape;
• causing a single annular aperture to limit electrons scattered from the sample;
• and
• causing an electron detector with an annular light receiving surface to detect scattered electrons that have passed through the single annular aperture.