Instrumented Platform For Vibration Sensitive Equipment
AssigneeNewport Corporation
InventorsVyacheslav M. Ryaboy, Warren Booth
Life of this patent
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Abstract
A platform that includes a vibration sensor located within an inner core of a table. The table may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the table. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the table. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.
Claims25
A platform assembly that supports a vibration-sensitive payload, comprising:
- a table that has a first surface coupled to the vibration-sensitive payload, a second surface, and an inner core located between said first and second surfaces;
- and,
- a vibration sensor located within said inner core.
A platform assembly that supports a vibration-sensitive payload, comprising:
- a table that has a first surface coupled to the vibration-sensitive payload, a second surface and an inner core located between said first and second surfaces;
- and,
- vibration sensor means for sensing a vibration of said first surface.
A method for sensing a vibration of a vibration-sensitive payload coupled to a first surface of a platform table, comprising:
- sensing the vibration with a vibration sensor location within an inner core of a platform table.
Dependencies are inferred from the claim text.