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US 2012/0234946 A1Published application
Forming nozzles
AssigneeFUJIFILM Corporation
InventorsGregory DeBrabander, Mark Nepomnishy
Life of this patent
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Abstract
Fluid ejection nozzles having a tapered section leading to a straight walled bore are described. Both the tapered section of the nozzle and the straight walled bore are formed from a single side of semiconductor layer so that the tapered section and the bore are aligned with one another, even when an array of nozzles are formed across a die and multiple dies are formed on a semiconductor substrate.
Claims10
A method for forming a nozzle plate of a fluid ejection device, comprising:
- etching a first surface of a semiconductor layer to form a straight walled feature that extends vertically and only part way to an etch stop layer adjacent to the semiconductor layer;
- applying a protecting layer on sidewall surfaces of the straight walled feature;
- etching a bottom of the straight walled feature to extend the feature to the etch stop layer and to form a bore;
- and
- extending side surfaces of the bore to cause a portion of the bore to widen.
2 more elements
A fluid ejection device, comprising:
- a silicon body having a descender formed therein;
- and
- a nozzle plate having a nozzle formed therein, wherein the nozzle has an inlet adjacent to the descender, the inlet having walls that are substantially parallel to one another, the inlet leading to a tapered section, the tapered section leading to a passage and the passage leading to an outlet, wherein the inlet is in fluid communication with the descender but has a cross sectional dimension different from the descender.
Dependencies are inferred from the claim text.