Monolithically applied heating elements on saw substrate
AssigneePhonon Corporation
InventorsTom A. Martin, Pierre A. Dufilie, Joseph V. Adler
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Abstract
A surface acoustic wave (SAW) device comprising a piezoelectric substrate having a working surface with an active zone capable of propagating an acoustic wave on said working surface; at least one interdigital transducer on the working surface, having interdigital fingers aligned in the active zone for inducing or receiving surface acoustic waves in the active zone; and a heating element on the working surface; wherein the transducer, heating element and preferably a temperature sensor are monolithically formed on the substrate.
Claims35
A surface acoustic wave (SAW) device comprising:
- a piezoelectric substrate having a working surface with an active zone capable of propagating an acoustic wave on said working surface;
- at least one interdigital transducer on the working surface, having interdigital fingers aligned in the active zone for inducing or receiving surface acoustic waves in the active zone;
- and
- a heating element on the working surface;
- wherein the transducer and heating element are monolithically formed on the substrate.
A surface acoustic wave (SAW) resonator comprising:
- a piezoelectric substrate having a working surface with at least two resonator gratings associated with a respective two active zones capable of propagating an acoustic wave on said working surface;
- at least one interdigital transducer on the working surface, aligned for inducing or receiving surface acoustic waves in the active zones;
- at least one heating element on the working surface;
- wherein each heating element comprises a plurality of groups of thin film metallic meander resistor electrode strips;
- and
- the transducers and heating elements are monolithically formed on the working surface.
In a method for fabricating a surface acoustic wave device with a heating element, said device including a piezoelectric substrate having a working surface with an active zone capable of propagating an acoustic wave on said working surface;
- and at least one interdigital transducer on the working surface, aligned for inducing surface acoustic waves in the active zone;
- wherein the improvement comprises forming a heating element on the working surface, adjacent to at least the active zone, monolithically with the transducer.
The method of claim 34, wherein each of at least one heating element is formed as a grouped meander pattern of thin film metallic resistor electrodes and a distinct temperature sensor is monolithically formed adjacent a respective heating element as a different monolithic grouped meander pattern of thin film metallic resistor electrodes.
The method of claim 34, wherein each temperature sensor is formed between an active zone and a heating element.
Dependencies are inferred from the claim text.