Laser processing method
AssigneeHamamatsu Photonics K.K.
InventorsMakoto Nakano, Takashi Inoue, Shinji Kohyama
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Abstract
Laser lights L1 to L3 are relatively moved along a line to cut 5, while repeating a converging step of simultaneously converging the laser lights L1 to L3 at converging positions P1 to P3 separated from each other along the line 5. This forms a plurality of modified spots S along the line 5 and causes the plurality of modified spots S to form a modified region 7. The converging positions P1 to P3 in the repeated converging steps are kept from being superposed on each other, while at least one of converging positions P21 to P23 in the converging step in a later stage is located between converging positions P11 to P13 in the converging step in an earlier stage.
Claims5
A laser processing method for converging a plurality of laser lights at an object to be processed so as to form a modified region in the object along a line to cut, the method comprising:
- a converging step of simultaneously converging a plurality of laser lights at a plurality of converging positions separated from each other along the line to cut;
- and
- a forming step of relatively moving the plurality of laser lights along the line to cut while repeating the converging step, so as to form a plurality of modified spots along the line to cut and cause the plurality of modified spots to form the modified region;
- wherein the plurality of converging positions in the repeated converging steps are kept from being superposed on each other;
- and
- wherein at least one of the plurality of converging positions in the converging step in a later stage is located between the plurality of converging positions in the converging step in an earlier stage.
Dependencies are inferred from the claim text.