Laser scribing with extended depth affectation into a workplace

A method of laser scribing a workpiece, the method comprising:

• generating a laser beam having a wavelength, a pulse duration, and a pulse energy sufficient to provide nonlinear multiphoton absorption within material of the workpiece;
• focusing the laser beam using a lens that introduces spherical aberrations with a longitudinal spherical aberration range sufficient to provide an extended depth of field (DOF) within the workpiece such that a single pulse of the laser beam causes an extended depth affectation within the workpiece;
• and
• scanning the workpiece with the laser beam such that a series of extended depth affectations are caused by a series of pulses at a series of locations along the workpiece.

A laser machining system comprising:

• a laser for generating a laser beam having a wavelength, a pulse duration, and a pulse energy sufficient to provide nonlinear multiphoton absorption within material of the workpiece;
• a beam delivery system for focusing the laser beam and directing the laser beam toward a workpiece, the beam delivery system including a beam expander for expanding the laser beam and a lens that introduces spherical aberrations with a longitudinal spherical aberration range sufficient to provide an extended depth of field (DOF) within the workpiece such that a single pulse of the laser beam causes an extended affectation within the workpiece;
• and
• a workpiece positioning stage for moving the workpiece to scan the laser beam across the workpiece such that a series of pulses form a series of extended affectations within the workpiece.