Cooling device operating method and inspection apparatus
AssigneeTokyo Electron Limited
InventorMasataka HATTA
Life of this patent
Estimating the term…
Abstract
A cooling device operating method which is capable of reducing power consumption of the cooling device used in an inspection apparatus. The method controls a cooling device which cools a wafer chuck on which a semiconductor wafer is loaded. The temperature of the wafer chuck is controllable through the cooling device and a heating device. Low temperature and high temperature inspections of the wafer can be performed under control of the controller, and the cooling device is continuously run through control of the controller for the low temperature inspection while it is stopped at least one time at the start of the high temperature inspection through the controller for the high temperature inspection.
Claims6
A cooling device operating method for controlling a cooling device which cools a loading table under control of a controller for performing low temperature inspection and high temperature inspection of an object under control of the controller by loading the object on a loading table of which the temperature is controllable through the cooling device and a heating device, the method comprising:
- continuously running the cooling device through control of the controller for the low temperature inspection;
- and
- stopping the cooling device through control of the controller at least one time at the start of the high temperature inspection.
A cooling device operating method for controlling a cooling device which cools a loading table under control of a dedicated controller provided in the cooling device for performing low temperature inspection and high temperature inspection of an object under control of a controller by loading the object on a loading table of which the temperature is controllable through the cooling device and a heating device, the method comprising:
- continuously running the cooling device through control of the dedicated controller for the low temperature inspection;
- and
- stopping the cooling device through control of the dedicated controller at least one time at the start of the high temperature inspection.
An inspection apparatus comprising:
- a temperature-controllable loading table on which an object is loaded;
- a heating device which heats the loading table;
- a cooling device which cools the loading table;
- and
- a controller which controls the heating device and the cooling device for low temperature inspection and high temperature inspection of the object,
- wherein the controller controls the cooling device to stop at least one time at the start of the high temperature inspection for the high temperature inspection.
An inspection apparatus comprising:
- a temperature-controllable loading table on which an object is loaded;
- a heating device which heats the loading table;
- a cooling device which cools the loading table;
- a controller which controls the heating device and the cooling device for low temperature inspection and high temperature inspection of the object;
- and
- a dedicated controller provided in the cooling device,
- wherein the dedicated controller controls the cooling device to stop at least one time at the start of the high temperature inspection for the high temperature inspection.
Dependencies are inferred from the claim text.