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US 2012/0234240 A1Published application
Graphene synthesis chamber and method of synthesizing graphene by using the same
AssigneesNPS Corporation, Samsung Techwin Co., Ltd.
InventorsDong-Kwan WON, Won-Sik NAM
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Abstract
A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.
Claims20
A graphene synthesis chamber comprising:
- a chamber case in which a substrate comprising a metal thin film is placed;
- a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case;
- a main heating unit which emits at least one light to the inner space to heat the substrate;
- and
- at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate.
2 more elements
Dependencies are inferred from the claim text.