Protective filter for vacuum pump
AssigneeTeoss Co., Ltd.
InventorsTsuyoshi MURAI, Toshinori KONAKA
Life of this patent
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Abstract
A protective filter for vacuum pump comprises: a casing being supplied exhaust gas including microparticles through an exhaust pipe and accommodating microparticle collection liquid inside; a rotating drum having a rotating cylinder and a basket, being filled a filler, the exhaust gas supplied into the casing flows into the rotating cylinder contacting the microparticle collection liquid at a surface of the filler, the exhaust gas is discharged through an opening provided at one end of the rotating cylinder; a roller rotating the basket; and a connecting pipe having an opening facing the opening of the rotating cylinder, fixed to the casing, and connected to the vacuum pump.
Claims4
a protective filter for vacuum pump comprising:
- a casing being supplied exhaust gas including microparticles through an exhaust pipe and accommodating microparticle collection liquid inside;
- a rotating drum having a rotating cylinder and a basket provided around the rotating cylinder, being filled a filler for collecting the microparticles, rotating inside the casing immersing a part of the filler to the microparticle collection liquid, the exhaust gas supplied into the casing flows into the rotating cylinder contacting the microparticle collection liquid at a surface of the filler, the exhaust gas is discharged through an opening provided at one end of the rotating cylinder;
- a roller rotating the basket;
- and
- a connecting pipe having an opening facing the opening of the rotating cylinder, fixed to the casing, and connected to the vacuum pump.
Dependencies are inferred from the claim text.