Gage pressure transducer and method for making the same
AssigneeKulite Semiconductor Products, Inc.
InventorsANTHONY D. KURTZ, Nora Kurtz
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Abstract
A gage pressure transducer comprising a first pressure sensing assembly exposed to a main pressure and a second pressure sensing assembly exposed to a reference pressure. The pressure sensing assemblies comprise half-bridge sensors and means for using an alignment glass plate with each sensor which reduces the amount of oil required for operation, which consequently reduces the back pressures caused by large volumes of oil. The pressure sensor assemblies are hermetically sealed using glass frits, therefore enabling the gage pressure transducer to robustly and accurately measure pressure in harsh environments.
Claims20
A gage transducer assembly, comprising:
- a first sensing assembly housed in a first section of a housing, the first sensing assembly being exposed to a first pressure and comprising a first half-bridge piezoresistive sensing network;
- a second sensing assembly housed in a second section of a housing, the second sensing assembly being exposed to a second pressure and comprising a second half-bridge piezoresistive sensing network;
- and
- an oil region less than 0.015 inches in thickness.
A gage transducer assembly, comprising:
- a first sensing assembly housed in a first section of a housing, the first sensing assembly comprising a first half-bridge piezoresistive sensing network;
- and
- a second sensing assembly housed in a second section of a housing, the second sensing assembly comprising a second half-bridge piezoresistive sensing network;
- wherein the first and second sensing assemblies are substantially identical in configuration and further wherein the first half-bridge piezoresistive sensing network and the second half-bridge piezoresistive sensing network are in electrical communication with each other to form a complete Wheatstone bridge.
A method of making an oil-filled pressure transducer, comprising:
- preparing substantially identical first and second leadless sensor assemblies, comprising:
- mounting an alignment plate within a header shell having a protruding top surface, wherein the alignment plate has an oil tube alignment aperture and a sensor accommodating aperture;
- inserting a sensor module comprising a half-bridge sensing element into the sensor accommodating aperture of the alignment plate;
- mounting a diaphragm to the protruding top surface of the header shell, such that an oil accommodating region is defined above the sensor module and between the diaphragm and the alignment plate;
- and
- welding the first and second leadless sensor assemblies into first and second sections of a housing, respectively.
Dependencies are inferred from the claim text.