# US 2012/0234094 A1 · Methods and apparatus for improving performance of an accelerometer

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- Number: US 2012/0234094 A1
- Document ID: US20120234094A1
- Status: Published application
- Kind: A1
- Application number: 13/047,008
- Filed: 2011-03-14
- Published: 2012-09-20
- Earliest claimed: 2011-03-14
- Assignees: Honeywell International Inc.
- Inventors: John S. Starzynski
- Web page: https://patentgrep.com/patent/US20120234094A1

## CPC

- G01P 15/097: by vibratory elements
- Y10T 29/49002: Electrical device making
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An accelerometer for reducing undesired attraction or repulsion forces between a proof mass and a cover. An exemplary accelerometer includes a proof mass, a base, a flexure that flexibly attaches the proof mass to the base, at least one double-ended tuning fork (DETF) attached at one end to the proof mass and at another end to the base, and a housing structure that encloses the proof mass within a cavity. A layer of graphene is located on at least a portion of the nonconductive surfaces within the housing structure. The nonconductive surfaces include a surface on the proof mass, the housing structure, the base, the flexure, or the DETF. The layer of graphene is attached to a heat sink and/or to an electrical charge dissipation component.

## Claims

### Claim 1

A vibrating-beam accelerometer comprising:
a proof mass;
a base;
a flexure configured to flexibly attach the proof mass to the base;
at least one double-ended tuning fork (DETF) attached at one end to the proof mass and at another end to the base;
a housing structure configured to enclose the proof mass within a cavity;
a layer of graphene located on at least a portion of nonconductive surfaces located within the housing structure.

### Claim 2 (depends on 1)

The accelerometer of claim 1, wherein the nonconductive surfaces comprise a surface on at least one of the proof mass or the housing structure.

### Claim 3 (depends on 1)

The accelerometer of claim 1, wherein the layer of graphene is located on at least one of an interior surface of the base and the proof mass.

### Claim 4 (depends on 1)

The accelerometer of claim 1, further comprising at least one heat sink, wherein the layer of graphene is attached to the at least one heat sink.

### Claim 5 (depends on 1)

The accelerometer of claim 1, further comprising at least one electrical charge dissipation component, wherein the layer of graphene is attached to the at least one electrical charge dissipation component.

### Claim 6

A method comprising:
depositing at least one area of graphene to at least a portion of the nonconductive surfaces in an accelerometer comprising:
a proof mass;
a base;
a flexure configured to flexibly attach the proof mass to the base;
at least one double-ended tuning fork (DETF) attached at one end to the proof mass and at another end to the base; and
a housing structure configured to enclose the proof mass within a cavity; and
connecting the one or more areas of graphene to at least one of a heat sink or an electrical charge dissipation component.

### Claim 7 (depends on 6)

The method of claim 6, wherein depositing comprises depositing the graphene prior to attaching the housing structure to the base.