Atmospheric Sensor, NFC Device, Package and Manufacturing Method
AssigneeNXP B.V.
InventorsAurelie Humbert, Dirk Gravesteijn, Pit Teunissen, Cornelis Wilhelmus Maria Bastiaansen
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Abstract
Disclosed is a sensor for detecting a component (20) of an atmosphere, the sensor comprising a sensing surface (14, 16) covered by a barrier layer (18) of a material switchable between respective layer orientations that have permeability to the component. A NFC device comprising such a sensor, a package incorporating the NFC device and a method of manufacturing the sensor are also disclosed.
Claims15
A sensor for detecting a component of an atmosphere, the sensor comprising a sensing surface covered by a barrier layer of a material switchable between respective layer orientations that have different permeability to the component.
A method of manufacturing a sensor for detecting a component of an atmosphere, comprising:
- providing a substrate;
- forming at least one electrode on said substrate;
- and
- depositing a barrier layer over the resultant structure, said barrier layer being of a material switchable between respective layer orientations that have different permeability to the component.
Dependencies are inferred from the claim text.