Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same

A method for manufacturing a grinding wheel truing tool, comprising:

• (a) on a three-dimensional construction program, forming a groove in the shape of an edge of a completed wafer at a portion of an outer periphery of a cylindrical subject with a shape dimension of a round fine-grinding wheel having no groove, the cylindrical subject having a central axis slanted at a predetermined angle;
• (b) through computer simulation, rotating the cylindrical subject based on the central axis to expand the wafer edge-shaped groove along the outer periphery of the cylindrical subject;
• (c) obtaining a shape dimension of the expanded groove as a shape dimension of an edge of a second truer;
• and
• (d) manufacturing a second truer using the obtained shape dimension.