Photoelectric conversion element manufacturing apparatus

Abstract

Provided is a photoelectric conversion element manufacturing apparatus capable of effectively performing an annealing treatment on a flexible substrate in a small space, minimizing an increase in the area of the apparatus in an installation space and the processing time, ensuring high productivity, and improving the electric characteristics of a photoelectric conversion element. The photoelectric conversion element manufacturing apparatus forms the photoelectric conversion element and a transparent conductive film on a flexible substrate (1) and transports the flexible substrate (1) to a winding chamber (5) so as to wind around a winding roller (8) provided in the winding chamber (5). The winding chamber (5) includes a roller core heater (11), which is a heating mechanism that performs an annealing treatment on the flexible substrate (1) which is being wound after the film forming process.

Dependencies are inferred from the claim text.