Shape measurement device and shape measurement method
AssigneeSharp Kabushiki Kaisha
InventorRyou Inoshiri
Life of this patent
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Abstract
A MOCVD device (shape measurement device) of the present invention measure including the shape of measurement object with use of a mobile platform (rotating table) for moving a substrate, that is, the measurement object, velocity measuring means (21) utilizing the Doppler effect of a laser beam, measurement object detecting means (25), arithmetic processing means (24), and storing means. The arithmetic processing means (24) includes: measurement object velocity extracting means (24a) for extracting the velocity of a measurement object; velocity average calculating means (24b) for calculating a velocity mean value from velocity data; subtracting means (24e) for subtracting the velocity mean value from the velocity data; and adding means (24d) for integrating the velocity.
Claims8
A shape measurement device comprising:
- velocity measuring means utilizing a Doppler effect;
- measurement object detecting means for detecting a position of a measurement object;
- and
- arithmetic processing means for computing a shape of the measurement object,
- the arithmetic processing means including:
- measurement object velocity extracting means for calculating a velocity of the measurement object by arithmetically processing a signal outputted from the velocity measuring means and a signal outputted from the measurement object detecting means;
- velocity average calculating means for calculating a velocity mean value for the measurement object with use of at least one signal outputted by the measurement object velocity extracting means;
- subtracting means for subtracting the velocity mean value from the velocity calculated by the measurement object velocity extracting means;
- and
- integrating means for calculating a time integral of a velocity obtained by the subtracting means.
A shape measurement device comprising:
- velocity measuring means utilizing a Doppler effect;
- measurement object detecting means for detecting a position of a measurement object;
- and
- arithmetic processing means for computing a shape of the measurement object,
- the arithmetic processing means including:
- measurement object velocity extracting means for calculating a velocity of the measurement object by arithmetically process a signal outputted from the velocity measuring means and a signal outputted from the measurement object detecting means;
- differential computing means for calculating a time differential of data obtained by the measurement object velocity extracting means;
- and
- adding means for calculating a time integral twice of the data obtained from the differential computing means.
A shape measurement method comprising:
- a velocity measuring step utilizing of a Doppler effect;
- a measurement object detecting step for detecting a position of a measurement object;
- and
- an arithmetic processing step for computing a shape of the measurement object,
- the arithmetic processing step including:
- a measurement object velocity extracting step for calculating a velocity of the measurement object by arithmetically processing a signal outputted in the velocity measuring step and a signal outputted in the measurement object detecting step;
- a velocity average calculating step for calculating a velocity mean value for the measurement object with use of at least one signal outputted in the measurement object velocity extracting step;
- a subtracting step for subtracting the velocity mean value, which is an output in the velocity average calculating step, from the velocity calculated in the measurement object velocity extracting step;
- and
- an integrating step for calculating a time integral of a velocity obtained in the subtracting step.
A shape measurement method comprising:
- a velocity measuring step utilizing of a Doppler effect;
- a measurement object detecting step for detecting a position of a measurement object;
- and
- an arithmetic processing step for computing a shape of the measurement object,
- the arithmetic processing step including:
- a measurement object velocity extracting step for extracting a velocity of the measurement object by arithmetically processing a signal outputted in the velocity measuring step and a signal outputted in the measurement object detecting step;
- a differential arithmetic processing step for calculating a time differential of data obtained in the measurement object velocity extracting step;
- and
- an adding step for calculating a time integral twice of the data obtained in the differential arithmetic processing step.
Dependencies are inferred from the claim text.