Inertial Sensing With Spatially Distributed Sensor Array And Two Dimensional Data Processing

Abstract

A spatially distributed MEMS inertial sensor array is designed to reduce or cancel measurement errors and to increase the signal detection accuracy. By combining the measurements from a pair of sensors having sensing axes in two different, non-orthogonal directions, the correlated error due to the environmental changes are cancelled or reduced and the uncorrelated random noise is also reduced by the square root of two. By sequentially sampling the sensor array in the time domain, the number of the ADC circuits can be largely reduced. A two dimensional signal processing method is used to process the sensor array output data, in order to further reduce the remaining errors. Namely, one dimension uses the outputs from multiple spatially distributed sensor sets and the other dimension is the time domain. The signal to noise ratio is increased by using the signal correlation in both the spatial domain and the time domain.

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