Wafer alignment system with optical coherence tomography
AssigneeInternational Business Machines Corporation
InventorsYongchun Xin, Xu Ouyang, Yunsheng Song, Tso-Hui Ting
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Abstract
A system for performing alignment of two wafers is disclosed. The system comprises an optical coherence tomography system and a wafer alignment system. The wafer alignment system is configured and disposed to control the relative position of a first wafer and a second wafer. The optical coherence tomography system is configured and disposed to compute coordinate data for a plurality of alignment marks on the first wafer and second wafer, and send that coordinate data to the wafer alignment system
Claims20
A system for performing alignment of two wafers, comprising:
- an optical coherence tomography system;
- and
- a wafer alignment system;
- wherein the wafer alignment system is configured and disposed to control the relative position of a first wafer and a second wafer, and wherein the optical coherence tomography system is configured and disposed to compute coordinate data for a plurality of alignment marks on the first wafer and second wafer;
- and send said coordinate data to the wafer alignment system.
A system for performing alignment of two wafers, comprising:
- a light source configured to emit light having a wavelength ranging between 1.1 micrometers and 1.6 micrometers;
- a collimating lens configured and disposed to collimate light from said light source;
- a beam splitter configured and disposed to split the light from said collimating lens into a reference path and a target path;
- an objective lens configured and disposed to focus light of the target path onto a set of wafers comprising a first wafer and a second wafer;
- a detector configured and disposed to receive light from the reference path and the target path;
- a computer system configured and disposed to compute a three-dimensional tomogram of the set of wafers and compute correction data;
- and
- a wafer stage control configured and disposed to receive correction data from the computer system and adjust the relative position of the first wafer and second wafer in response to said correction data.
A method for performing alignment of two wafers, the two wafers comprising a first wafer and a second wafer, comprising:
- obtaining a three-dimensional tomogram of the two wafers;
- computing alignment correction data;
- sending the alignment correction data to a wafer stage control;
- and
- adjusting the relative position of the two wafers with the wafer stage control in response to receiving said alignment data.
Dependencies are inferred from the claim text.