Substrate for growing carbon nanotubes, manufacturing method thereof, and manufacturing method of oriented carbon nanotubes
AssigneesWaseda University, Honda Motor Co., Ltd.
InventorsToshiyuki OHASHI, Toshio TOKUNE, Masahiro OTA, Hidefumi NIKAWA, Hiroshi KAWARADA, Takumi OCHIAI
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Abstract
A substrate for growing carbon nanotubes capable of elongating single-walled carbon nanotubes of an average diameter of less than 2 nm is provided. The substrate for growing carbon nanotubes 1 is equipped with a reaction prevention layer 3 formed on a base material 2, a catalyst material layer 4 formed on the reaction prevention layer 3, a dispersion layer 5 formed on the catalyst material layer 4, and a dispersion promotion layer 6 formed on the dispersion layer 5.
Claims20
A substrate for growing carbon nanotubes used in manufacturing oriented carbon nanotubes using an antenna-type plasma CVD, comprising:
- a base material,
- a reaction prevention layer formed on the base material which prevents reaction between the base material and a catalyst material,
- a catalyst material layer formed on the reaction prevention layer,
- a dispersion layer formed on the catalyst material layer which disperses the catalyst material contained in the catalyst material layer, and
- a dispersion promotion layer formed on the dispersion layer which increases dispersion action of the catalyst material contained in the catalyst material layer by the dispersion layer,
- wherein the dispersion promotion layer comprises Ti or an oxide thereof.
A manufacturing method of a substrate for growing carbon nanotubes used in manufacturing oriented carbon nanotubes using an antenna-type plasma CVD, comprising the steps of:
- forming a reaction prevention layer on a base material which prevents reaction between the base material and a catalyst material;
- forming a catalyst material layer on the reaction prevention layer;
- forming a dispersion layer on the catalyst material layer which disperses the catalyst material contained in the catalyst material layer;
- and
- forming a dispersion promotion layer on the dispersion layer which increases dispersion action of the catalyst material contained in the catalyst material layer by the dispersion layer.
A manufacturing method of oriented carbon nanotubes using an antenna-type plasma CVD having an antenna precisely controlled so that a tip thereof coincides with an anti-node (¼ wavelength) of a stationary wave of microwaves, comprising;
- generating plasma in a treatment chamber depressurized to a predetermined pressure under circulation of gas as a material for carbon nanotubes;
- and
- holding a substrate equipped with a base material, a reaction prevention layer formed on the base material which prevents reaction between the base material and a catalyst material, a catalyst material layer formed on the reaction prevention layer, a dispersion layer formed on the catalyst material layer which disperses the catalyst material contained in the catalyst material layer, and a dispersion promotion layer formed on the dispersion layer which increases dispersion action of the catalyst material contained in the catalyst material layer by the dispersion layer, at a distance with respect to a generation region of the plasma which is capable of avoiding attack of ions generated as a by-product of radicals generated at the region, and which is reachable by the radicals at a radical state.
Dependencies are inferred from the claim text.