Methods for introducting a first gas and a seceond gas into a reaction chamber
AssigneeMEMC Electronic Materials, Inc.
InventorsMilind Kulkarni, Puneet Gupta, Balaji Devulapalli, Jameel Ibrahim, Vithal Revankar, Kwasi Foli
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Abstract
Gas distribution units of fluidized bed reactors are configured to direct thermally decomposable compounds to the center portion of the reactor and away from the reactor wall to prevent deposition of material on the reactor wall and process for producing polycrystalline silicon product in a reactor that reduce the amount of silicon which deposits on the reactor wall.
Claims5
A process for introducing a first gas and a second gas into a reaction chamber of a reactor, the reactor comprising at least one reaction chamber wall and a gas distribution unit for distributing the first gas and the second gas into the reaction chamber, the distribution unit comprising a distributor having a plurality of distribution openings including at least one peripheral opening and at least one central opening, the distribution openings having a channel portion and a throttle portion, the distribution unit further comprising an inlet block, an outer annular ring, an inner annular ring concentric to the outer annular ring, a product withdrawal tube concentric to the outer annular ring and inner annular ring and that extends through the distributor and inlet block, the space between the distributor, inlet block, outer annular ring and inner annular ring defining a first gas plenum, the space between the distributor, inlet block, inner annular ring and the product withdrawal tube defining a second gas plenum, the process comprising:
- introducing the first gas into the first gas plenum and through the peripheral openings into the reaction chamber, the first gas passing through the channel portion and throttle potion of the distribution openings;
- and
- introducing the second gas through the second gas plenum and through the central openings into the reaction chamber, the second gas passing through the channel portion and throttle potion of the distribution openings.
Dependencies are inferred from the claim text.