US 2012/0230808 A1 · SUBSTRATE TRANSPORT APPARATUS, SUBSTRATE TRANSPORT METHOD, AND RECORDING MEDIUM

Abstract

A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates substrates and spacer members to transport a substrate or a spacer member between the accommodating part and the first fork. A first grip module is disposed on a first surface of the second fork to hold and support the substrate from an upward direction. A second grip module is disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.

Claims15

Dependent claims

A substrate transport apparatus which transports a stacked member to a substrate holding part containing a plurality of stacked members, each stacked member including two substrates with adjacent back surfaces thereof stacked via a spacer member, where the plurality of stacked members are held at predetermined intervals in an up/down direction, the substrate transport apparatus comprising:

a first fork disposed to be movable in a forward/backward direction to the substrate holding part to transport the stacked member to or receive the stacked member from the substrate holding part;
a second fork arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates the substrates and the spacer members, to transport a substrate or a spacer member between the accommodating part and the first fork;
a first grip module disposed on a first surface of the second fork to hold and support the substrate from an upward direction;
and
a second grip module disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.

2 more elements

A substrate transport method for transporting a stacked member to a substrate holding part containing a plurality of stacked members, each stacked member including two substrates with adjacent back surfaces thereof stacked via a spacer member, where the plurality of stacked members are held at predetermined intervals in an up/down direction, the substrate transport method comprising:

a first step of holding, by a first grip module disposed on a first surface of a second fork disposed above a first fork, a first substrate contained in an accommodating part from a downward direction and placing the first substrate on the first fork by turning the second fork upside down;
a second step of holding, by a second grip module disposed on the first surface of the second fork on the same side as the first grip module, a spacer member contained in the accommodating part from an upward direction and placing the spacer member on the first substrate placed on the first fork;
and
a third step of holding, by the first grip module, a second substrate contained in the accommodating part from an upward direction and placing the second substrate on the spacer member placed over the first fork.

1 more element

Dependencies are inferred from the claim text.

Substrate transport apparatus, substrate transport method, and recording medium

Life of this patent

Substrate transport apparatus, substrate transport method, and recording medium

Life of this patent

Abstract

Claims15