Scanner for gcib system
AssigneeTEL Epion Inc.
InventorsMatthew C. GWINN, Avrum FREYTSIS, Jay R. WALLACE
Life of this patent
Estimating the term…
Abstract
Disclosed are an apparatus, system, and method for scanning a substrate or other workpiece through a gas-cluster ion beam (GCIB), or any other type of ion beam. The workpiece scanning apparatus is configured to receive and hold a substrate for irradiation by the GCIB and to scan it through the GCIB in two directions using two movements: a reciprocating fast-scan movement, and a slow-scan movement. The slow-scan movement is actuated using a servo motor and a belt drive system, the belt drive system being configured to reduce the failure rate of the workpiece scanning apparatus.
Claims20
An apparatus for scanning a workpiece through an ion beam, comprising:
- an elongated member adapted to mount a workpiece at a first end;
- a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the first end, and adapted to repetitively scan the workpiece through the ion beam along an arcuate path;
- a slow-scan mechanism suspending the elongated member and rotational mechanism, and adapted to cause linear movement of the rotational mechanism and the elongated member, to cause different portions of the workpiece to pass through the ion beam, the slow-scan mechanism comprising:
- a shuttle drive assembly having a rail and a shuttle, the rotational mechanism being attached to and suspended by the shuttle;
- a first pulley;
- a second pulley;
- a first belt mounted over the first and second pulleys, and attached to the shuttle;
- and
- a drive mechanism to actuate the first belt.
A method for scanning a workpiece through an ion beam, comprising:
- mounting a workpiece within an ion beam path at a first end of an elongated member;
- partially, repetitively rotating the elongated member using a rotational mechanism attached to a point of rotation on the elongated member, the point of rotation being away from the first end, to make repetitive scans of the workpiece through the ion beam path, along an arcuate path;
- moving the elongated member and rotational mechanism along a slow-scan mechanism, to which the rotational mechanism is attached and is suspended by, the moving causing different portions of the workpiece to pass through the ion beam path during the repetitive scans, the slow-scan mechanism comprising:
- a shuttle drive assembly having a rail and a shuttle, the rotational mechanism being attached to and suspended by the shuttle;
- a first pulley;
- a second pulley;
- a first belt mounted over the first and second pulleys, and attached to the shuttle;
- and
- a drive mechanism to actuate the first belt,
- wherein the moving includes actuating the drive mechanism and the first belt so as to cause linear movement of the shuttle along the rail.
A system for processing workpieces using a gas cluster ion beam (GCIB), comprising:
- a nozzle to form a gas cluster beam from a gas supplied by a gas supply system;
- a skimmer for removing undesired gas clusters from the gas cluster beam;
- an ionizer to ionize the gas cluster beam and form a gas cluster ion beam (GCIB);
- an accelerator power supply to accelerate the gas cluster ion beam (GCIB);
- a workpiece scanning mechanism enclosed in a processing chamber and configured to scan the workpiece through the gas cluster ion beam (GCIB), the workpiece scanning mechanism comprising:
- an elongated member adapted to mount a workpiece at a first end;
- a rotational mechanism mounting the elongated member at a point of rotation located on the elongated member away from the first end, and adapted to repetitively scan the workpiece through the gas cluster ion beam (GCIB) along an arcuate path;
- a slow-scan mechanism suspending the elongated member and rotational mechanism, and adapted to cause linear movement of the rotational mechanism and the elongated member, to cause different portions of the workpiece to pass through the gas cluster ion beam (GCIB), the slow-scan mechanism comprising:
- a shuttle drive assembly having a rail and a shuttle, the rotational mechanism being attached to and suspended by the shuttle;
- a first pulley;
- a second pulley;
- a first belt mounted over the first and second pulleys, and attached to the shuttle;
- and
- a drive mechanism to actuate the first belt.
Dependencies are inferred from the claim text.