Electrostatic lenses and systems including the same

A system, comprising:

• an electrostatic lens positioned in a path between a charged-particle source and a charged-particle detector;
• the electrostatic lens comprising:
• a first electrode having a first aperture positioned in the path and aligned with a first axis;
• a second electrode positioned in the path between the first electrode and the charged-particle detector, the second electrode having a second aperture positioned in the path and aligned with a second axis, the second axis being parallel to the first axis and displaced from the first axis along a first direction;
• a third electrode positioned in the path between the first electrode and the second electrode;
• and
• a potential generator coupled to the first, second, and third electrodes,
• wherein during operation, the potential generator applies a first potential to the first electrode, a second potential to the second electrode, and a third potential to the third electrode so that the electrostatic lens directs a beam of charged particles from the charged-particle source propagating along the first axis to propagate along the second axis.