Integrated High Frequency BALUN and Inductors
AssigneeTheta Microelectronics, Inc.
InventorYannis Papananos
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Abstract
Integrated high frequency balanced-to-unbalanced transformers and inductors suitable for operation in high frequencies, such as radio frequencies. Embodiments disclosed give consideration to issues related to the layout of the top and bottom inductors for the minimization of capacitive effects between layers and methods of manufacturing thereof. A displacement between the conductive paths of the top inductor and the bottom inductor is shown that provides for superior performance over prior art solutions.
Claims8
A method for manufacturing an on-chip BALUN transformer using a manufacturing process, the method comprising:
- forming a first winding conductive path in a first metal layer;
- forming an insulator layer using an insulating material to insulate between said first metal layer and at least a subsequent metal layer;
- forming a symmetrical second winding conductive path in a second metal layer over at least an insulating layer that insulates the second winding conductive path from at least the first winding conductive path, the second winding conductive path essentially placed over the first winding conductive path, the second winding conductive path being in vertical and horizontal displacement to the first winding conductive path;
- and,
- forming shunts to ensure the continuity of each of the first winding conductive path and the second winding conductive path.
A method of forming an on-chip device comprising:
- forming a first winding conductive path in a first metal layer essentially forming at least a portion of a spiral;
- and
- forming a second winding conductive path in a second metal layer essentially forming at least a portion of a spiral;
- the conductive path of the first winding and the conductive path of the second winding being formed horizontally displaced from each other to reduce capacitive coupling between the first winding and the second winding.
Dependencies are inferred from the claim text.