Tackiness adhesive sheet for thin-film substrate fixing
AssigneeNitto Denko Corporation
InventorsToshio SHINTANI, Yukio ARIMITSU
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Abstract
The present invention provides a manufacturing method for efficiently and stably forming a pattern on a thin-film substrate. A thin-film substrate, a tackiness adhesive sheet for thin-film substrate fixing, and a hard substrate are laminated in this order and a porous base material functioning as a core material of the tackiness adhesive sheet for thin-film substrate fixing has bore holes. Therefore, even if preliminary heating and drying is not applied, air bubbles are not generated between the thin-film substrate and the tackiness adhesive sheet for fixing during pattern formation on the thin-film substrate. This makes it possible to stably and efficiently form a pattern.
Claims14
A tackiness adhesive sheet for thin-film substrate fixing used in performing pattern formation on a thin-film substrate, wherein the pattern formation is performed in a state in which the thin-film substrate, the tackiness adhesive sheet for fixing, and a hard substrate are laminated in order, the tackiness adhesive sheet for fixing in use includes a porous base material, a porosity of the porous base material is 5% to 95%, and a hole diameter of the porous base material is 0.01 μm to 900 μm.
Dependencies are inferred from the claim text.