N-Type Silicon Solar Cell With Contact/Protection Structures
AssigneePalo Alto Research Center Incorporated
InventorBaomin Xu
Life of this patent
Estimating the term…
Loading patent…
AssigneePalo Alto Research Center Incorporated
InventorBaomin Xu
Estimating the term…
A solar cell is formed on an n-type semiconductor substrate having a p+ emitter layer by forming spaced-apart contact/protection structures on the emitter layer, depositing a blanket dielectric passivation layer over the substrate's upper surface, utilizing laser ablation to form contact openings through the dielectric layer that expose corresponding contact/protection structures, and then forming metal gridlines on the upper surface of the dielectric layer that are electrically connected to the contact structures by way of metal via structures extending through associated contact openings. The contact/protection structures serve both as protection against substrate damage during the contact opening formation process (i.e., to prevent damage of the p+ emitter layer caused by the required high energy laser pulses), and also serve as optional silicide sources that facilitate optimal contact between the metal gridlines and the p+ emitter layer.
A solar cell comprising:
A method for fabricating an electrical circuit formed on a silicon substrate having an upper surface, the method comprising:
A method for fabricating solar cells formed on an n-type silicon substrate having a p+emitter layer disposed under an upper surface of the n-type silicon wafer, the method comprising:
Dependencies are inferred from the claim text.