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US 2012/0222700 A1Published application
Template substrate processing apparatus and template substrate processing method
OwnerTakumi OTAinventor
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Abstract
According to one embodiment, a template substrate processing apparatus used in imprint lithography, includes a stage which has a convex portion that engages with a concave portion formed at an underside of the template substrate.
Claims15
A template substrate processing apparatus used in imprint lithography, comprising a stage which has a convex portion that engages with a concave portion formed at an underside of the template substrate.
A template substrate processing method used in imprint lithography, comprising:
- preparing a template substrate which has a concave portion at its underside;
- preparing a stage which has a convex portion that engages with the concave portion of the template substrate;
- placing the template substrate on the stage in such a manner that the concave portion of the template substrate engages with the convex portion of the stage;
- and
- subjecting the template substrate placed on the stage to a specific process.
2 more elements
Dependencies are inferred from the claim text.