Method for manufacturing graphene electronics
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorErnesto E. Marinero
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Abstract
An electrical circuit structure employing graphene as a charge carrier transport layer. The structure includes a plurality of graphene layers. Electrical contact is made with one of the layer of the plurality of graphene layers, so that charge carriers travel only through that one layer. By constructing the active graphene layer within or on a plurality of graphene layers, the active graphene layer maintains the necessary planarity and crystalline integrity to ensure that the high charge carrier mobility properties of the active graphene layer remain intact.
Claims10
A method for manufacturing an electrical circuit structure, comprising:
- forming first and second electrically conductive contact pads;
- forming a plurality of graphene layers, the plurality of graphene layers being electrically separated from the first and second electrically conductive contact layers;
- and
- forming a single graphene layer over the plurality of graphene layers, the single graphene layer extending beyond the plurality of graphene layers to contact the first and second electrically conductive contacts.
A method for manufacturing an electrical circuit structure, comprising:
- forming a plurality of graphene layers;
- forming a mask structure over the plurality of graphene layers;
- performing a material removal process on a portion of the layers of graphene not protected by the mask, leaving at least one of the graphene layers intact;
- and
- forming an electrically conductive lead structure to contact the at least one intact graphene layer.
A circuit structure comprising:
- a plurality of layers of graphene formed one on another, the plurality of graphene layers including more than two graphene layers;
- and
- first and second electrical contacts, both of the first and second electrical contacts being electrically connected with two adjacent graphene layers of the plurality of layers of graphene that form a bi-layer graphene structure.
Dependencies are inferred from the claim text.