Method for using real-time apc information for an enhanced lot sampling engine
AssigneeInternational Business Machines Corporation
InventorsGary W. BEHM, Malek BEN SALEM, Yue LI
Life of this patent
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Abstract
A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.
Claims11
A computer program product comprising a computer readable storage medium having readable program code tangibly embodied in the storage medium, the computer program product includes at least one component operable to:
- pass a lot through a production process;
- calculate an advanced process control recipe parameter adjustment (RPA) distribution value using an advanced process controller (APC);
- calculate an APC calculated process capability (Cpk) value using the APC;
- communicate the RPA and the Cpk value to a lot sampling engine (LSE);
- utilize the LSE to correlate the RPA and the Cpk value in conjunction with a historical Cpk value calculated by the LSE to determine if sampling of the lot is indicated;
- and
- perform a measurement process of the lot, if sampling is indicated.
Dependencies are inferred from the claim text.