Capacitor structure
AssigneeInternational Business Machines Corporation
InventorNing Lu
Life of this patent
Estimating the term…
Abstract
The disclosure relates generally to capacitor structures and more particularly, to capacitor structures having interdigitated metal fingers. Metal finger capacitors may have at least one layer, the at least one layer including: a first set of fingers, wherein each finger of the first set includes an end integrally connected to a bus segment of a first bus; a second set of fingers interdigitated with the first set of fingers, wherein each finger of the second set includes an end integrally connected to a bus segment of a second bus; an in port integrally connected to the first bus and an out port integrally connected to the second bus; and wherein a width of the first and second bus is non-uniform across a length of the first and second bus.
Claims20
A metal finger capacitor (MFCAP) comprising at least one layer, the at least one layer including:
- a first set of fingers, wherein each finger of the first set includes an end integrally connected to a bus segment of a first bus;
- a second set of fingers interdigitated with the first set of fingers, wherein each finger of the second set includes an end integrally connected to a bus segment of a second bus;
- an in port integrally connected to the first bus and an out port integrally connected to the second bus;
- and
- wherein a width of the first and second bus is non-uniform across a length of the first and second bus.
A metal finger capacitor (MFCAP) comprising at least one layer, the at least one layer including:
- a first set of fingers, wherein each finger of the first set includes an end integrally connected to a bus segment of a first bus;
- a second set of fingers interdigitated with the first set of fingers, wherein each finger of the second set includes an end integrally connected to a bus segment of a second bus;
- an in port integrally connected to the first bus and an out port integrally connected to the second bus;
- and
- wherein widths of bus segments of the first and the second buses increase the more proximate the bus segments are to the in port and the out port.
Dependencies are inferred from the claim text.