Back to results
US 2012/0211871 A1Published application
Method of producing nanopatterned articles, and articles produced thereby
AssigneesUniversity of Massachusetts, The Regents of the University of California
InventorsThomas P. Russell, Soojin Park, Ting Xu
Life of this patent
Estimating the term…
Abstract
A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
Claims15
A layered article, comprising:
- a crystalline substrate comprising an annealed, miscut surface;
- and
- a block copolymer film disposed on the annealed, miscut surface;
- wherein the block copolymer film comprises a block copolymer comprising a first block and a second block;
- wherein the block copolymer film comprises
- a major block layer contacting the annealed, miscut surface, and comprising at least 65 weight percent of the first block, and
- a minor block layer contacting the major block layer, and comprising at least 80 weight percent of the second block;
- and
- wherein the block copolymer film defines a hexagonal array of cylindrical voids extending through the major block layer and the minor block layer.
6 more elements
Dependencies are inferred from the claim text.