Method of manufacturing a magnetic head for perpendicular magnetic recording

A method of manufacturing a magnetic head for perpendicular magnetic recording, the magnetic head comprising:

• a medium facing surface that faces toward a recording medium;
• a coil that generates a magnetic field corresponding to data to be written on the recording medium;
• a pole layer that allows a magnetic flux corresponding to the magnetic field generated by the coil to pass therethrough and generates a write magnetic field for writing the data on the recording medium by means of a perpendicular magnetic recording system;
• a pole-layer-encasing layer made of a nonmagnetic material and having a top surface and a pole-layer-encasing section formed of a groove that opens at the top surface and that accommodates the pole layer,
• the pole layer including a first layer made of a magnetic material and a second layer formed on the first layer,
• the method comprising the steps of:
• forming the pole-layer-encasing layer;
• forming the pole layer in the pole-layer-encasing section of the pole-layer-encasing layer;
• and
• forming the coil,
• wherein the step of forming the pole layer includes the steps of:
• forming an initial first layer by physical vapor deposition, the initial first layer being intended to become the first layer later by undergoing etching of a surface thereof;
• etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer;
• and
• forming the second layer on the first layer, wherein:
• the initial first layer forms a groove having an opening;
• and
• in the step of etching the surface of the initial first layer, the surface of the initial first layer is etched such that the opening becomes wider than before the etching.