Optical device inspecting apparatus

Abstract

To provide an optical device inspecting apparatus which can be set to take many objects at one time more freely compared with conventional apparatuses, and can accurately inspect even an optical device wherein an optical sensor is offset from a microlens. Provided is an optical device inspecting apparatus having a probe card unit and a lens unit. The probe card unit is provided with a main substrate, a guide plate and a probe. The guide plate is provided with a plurality of probe inserting holes. The probe is inserted into the probe inserting hole on the guide plate and fixed. The leading end portion of the probe protruding from the inserting hole has a shape of a cantilever. The lens unit is arranged at the opening on the main substrate, and makes light applied to an inspecting object incline as the light goes further from the optical system.

Dependencies are inferred from the claim text.