US 2012/0181714 A1Published application

Method for manufacturing master plate for optical disc

AssigneeRitek Corporation

InventorChun-Cheng Chang

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Abstract

Disclosed herein is a method for manufacturing a master plate of an optical disc. The method comprises the step of: (a) forming an inorganic resist layer on a substrate; (b) forming an organic photoresist layer on and in contact with the inorganic resist layer; (c) irradiating both the organic photoresist layer and the inorganic resist layer with a laser beam to form a first exposed region of the inorganic resist layer and a second exposed region of the organic photoresist layer; (d) removing the inorganic resist layer of the first exposed region and the organic photoresist layer of the second exposed region; (e) removing the patterned organic photoresist layer from the patterned inorganic resist layer; (f) conformally forming a release layer to cover the patterned inorganic resist layer; (g) plating a metal layer on the release layer; and (h) separating the metal layer and the release layer.

Claims20

Dependent claims

A method for manufacturing a master plate of an optical disc, comprising:

(a) forming an inorganic resist layer on a substrate;
(b) forming an organic photoresist layer on and in contact with the inorganic resist layer;
(c) irradiating both the organic photoresist layer and the inorganic resist layer with a laser beam to form a first exposed region of the inorganic resist layer and a second exposed region of the organic photoresist layer, such that the first exposed region of the inorganic resist layer performs a phase transition, wherein the first exposed region overlaps the second exposed region;
(d) removing the first exposed region of the inorganic resist layer and the second exposed region of the organic photoresist layer to form a patterned inorganic resist layer and a patterned organic photoresist layer;
(e) removing the patterned organic photoresist layer from the patterned inorganic resist layer;
(f) conformally forming a release layer to cover the patterned inorganic resist layer;
(g) plating a metal layer on the release layer;
and
(h) separating the metal layer from the release layer, so as to get metal layer as the master plate.

6 more elements

Dependencies are inferred from the claim text.