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US 2012/0141693 A1Published application
Ion sources, systems and methods
AssigneeALIS Corporation
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
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Abstract
Ion sources, systems and methods are disclosed.
Claims20
A method, comprising:
- generating an ion beam by interacting a gas with a gas field ion source;
- generating an electron beam using a system different from the gas field ion source;
- and
- using both the ion beam and the electron beam to interact with a sample.
1 more element
A system, comprising:
- a scanning electron microscope capable of providing an electron beam;
- and
- a gas field ion source capable of interacting with a gas to generate an ion beam,
- wherein the scanning electron microscope and the gas field ion source are positioned so that, during use, both the electron beam and the ion beam can be used to interact with a sample.
1 more element
Dependencies are inferred from the claim text.