Electron beam source and method of manufacturing the same
AssigneesNanotools GmbH, Carl Zeiss NTS GmbH
InventorsVolker Drexel, Ulrich Mantz, Bernd Irmer, Christian Penzkofer
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Abstract
A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.
Claims32
(canceled)
The method of claim 26, wherein a surface of an end of the tip that is distal from the base has a radius of curvature that is less than 100 nm.
The method of claim 26, wherein a dimension of the tip in its longitudinal direction extending away from the base is at least 2 times greater than a maximum dimension of the tip in a direction that is orthogonal to the longitudinal direction of the tip.
The method of claim 26, wherein a maximum dimension of the tip in its longitudinal direction is at least 50 nm.
The method of claim 26, wherein a dimension of the tip in its transverse direction is at least 500 nm.
The method of claim 26, wherein a thickness of the coating of the second material is at least 2 nm.
The method of claim 26, wherein a thickness of the coating of the second material is less than 50 nm.
The method of claim 26, wherein a center of the core comprises the first material.
The method of claim 26, wherein the first material has a modulus of elasticity that is greater than 150 kN/mm2.
The method of claim 26, wherein the first material has a modulus of elasticity that is less than 1100 kN/mm2.
The method of claim 26, wherein the core of the tip includes an inner core comprising a third material different from the first material, and a layer comprising the first material is applied onto the inner core.
The method of claim 26, wherein the first material is diamond-like carbon.
The method of claim 26, wherein the first material comprises sp3-bound carbon.
The method of claim 26, wherein the first material consists essentially of diamond-like carbon.
The method of claim 26, wherein the second material comprises a metal.
The method of claim 26, wherein the second material comprises a semi-conductor material.
The method of claim 26, further comprising connecting a voltage supply first and second electrical terminals,
- wherein the coating is electrically connected to the first terminal to the coating, and the extraction electrode is electrically connected to second terminal.
The method of claim 26, wherein a surface of the base includes a convex surface portion extending around an end of the tip close to the base.
The method of claim 26, wherein the base has a surface portion having a surface shape of axial symmetry relative to an axis of symmetry, and an angle between the axis of symmetry and a longitudinal direction of the tip is less than 10°.
A method, comprising:
- forming a core of a first material on a base using at least one deposition process selected from the group consisting of electron beam induced deposition and ion beam induced deposition;
- applying a coating of a second material on the core to provide a tip comprising the core and the coating;
- and
- arranging the core opposite to an opening of an extraction electrode, thereby forming an electron beam source.
(canceled)
Dependencies are inferred from the claim text.