US 2012/0130117 A1 · AROMATIC SULFONIUM SALT COMPOUND

Abstract

Disclosed is a photo-acid generator having high developing properties, a cationic polymerization initiator having high curing properties, and a resist composition and a cationically polymerizable composition containing the photo-acid generator and the cationic polymerization initiator, respectively. Specifically, disclosed is an aromatic sulfonium salt compound of general formula (I) and a photo-acid generator, a cationic polymerization initiator, a resist composition, and a cationically polymerizable composition containing the compound. In formula (I), R1 to R19 are each hydrogen, halogen, hydroxyl, optionally hydroxyl-substituted C1-C18 alkyl, optionally hydroxyl-substituted C1-C18 alkoxy, optionally hydroxyl-substituted C1-C18 thioalkoxy, etc.; An− is a monovalent anion; at least one of R1 to R19 is a substituent selected from the group consisting of hydroxyl, hydroxyl-substituted C1-C12 ester group, hydroxyl-substituted C1-C18 alkoxy, and hydroxyl-substituted C1-C18 thioalkoxy.

Claims20

Dependent claims

1-9. (canceled)

An aromatic sulfonium salt compound represented by general formula (I):

wherein R1, R2, R3, R4, R5, R6, R7, R8, R9, and R10 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an optionally hydroxyl-substituted alkyl group having 1 to 18 carbon atoms, an optionally hydroxyl-substituted ester group having 1 to 12 carbon atoms, an optionally hydroxyl-substituted alkoxy group having 1 to 18 carbon atoms, or an optionally hydroxyl-substituted thioalkoxy group having 1 to 18 carbon atoms;
R11, R12, R13, and R14 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, an optionally hydroxyl-substituted alkyl group having 1 to 18 carbon atoms, an optionally hydroxyl-substituted alkoxy group having 1 to 18 carbon atoms, or an optionally hydroxyl-substituted thioalkoxy group having 1 to 18 carbon atoms;
R15, R16, R17, R18, and R19 each independently represent a hydrogen atom, a hydroxyl group, a halogen atom, an optionally hydroxyl-substituted alkyl group having 1 to 18 carbon atoms, an optionally hydroxyl-substituted ester group having 1 to 12 carbon atoms, an optionally hydroxyl-substituted alkoxy group having 1 to 18 carbon atoms, or an optionally hydroxyl-substituted thioalkoxy group having 1 to 18 carbon atoms;
An− represents a monovalent anion;
at least one of R1 through R19 is a substituent selected from the group consisting of a hydroxyl group, a hydroxyl-substituted ester group having 1 to 12 carbon atoms, a hydroxyl-substituted alkoxy group having 1 to 18 carbon atoms, and a hydroxyl-substituted thioalkoxy group having 1 to 18 carbon atoms;
and
the methylene chain of the optionally hydroxyl-substituted alkyl group having 1 to 18 carbon atoms represented by R1 through R19, the optionally hydroxyl-substituted alkoxy group having 1 to 18 carbon atoms represented by R1 through R19, and the optionally hydroxyl-substituted thioalkoxy group having 1 to 18 carbon atoms represented by R1 through R19 is optionally interrupted by —O—.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/387,850Filed 28 Nov 2010

Priority

JP 2009-24581426 Oct 2009

Published

24 May 2012

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

C07C 381/12
Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00: sulfonium compounds
C07C 309/06
Of an acyclic saturated carbon skeleton: containing halogen atoms, or nitro or nitroso groups bound to the carbon skeleton
C09B 69/004
Dyes containing an onium group attached to the dye skeleton via a bridge: sulfonium group
G03F 7/0045
Photosensitive materials: with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

Aromatic sulfonium salt compound

Life of this patent

Aromatic sulfonium salt compound

Life of this patent

Abstract

Claims20