Controller, Lithographic Apparatus, Method of Controlling the Position of an Object and Device Manufacturing Method

A method comprising:

• using a plurality of actuators to apply forces to an object;
• using a gain balancing matrix to convert a first control signal, representing a set of forces desired to be provided to a center of gravity of the object, into a second control signal, representing an equivalent set of forces to be provided by the plurality of actuators;
• wherein a first gain balancing matrix is used at least if the first control signal is in a first frequency band and a second gain balancing matrix is used at least if the first control signal is in a second frequency band.

A device manufacturing method comprising:

• using a plurality of actuators to apply forces to one of a support and a substrate table;
• using a gain balancing matrix to convert a first control signal, representing a set of forces desired to be provided to a center of gravity of the one of the support and the substrate table, into a second control signal, representing an equivalent set of forces to be provided by a plurality of actuators;
• wherein a first gain balancing matrix is used at least if the first control signal is in a first frequency band and a second gain balancing matrix is used at least if the first control signal is in a second frequency band.