MEMS Device
AssigneeInfineon Technologies AG
InventorsFlorian Schoen, Mohsin Nawaz, Mihail Sararoiu
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Abstract
System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
Claims20
A microelectromechanical system (MEMS) comprising:
- a first anchor region;
- a MEMS structure fixed to the first anchor region;
- a first drive or trim electrode located adjacent a first surface of the MEMS structure;
- and
- a second drive or trim electrode located adjacent a second surface of the MEMS structure.
A method for operating a microelectromechanical system (MEMS), the method comprising:
- applying a first bias voltage to a membrane of the MEMS and a first electrode, wherein the first electrode is located adjacent a first surface of the membrane, and a second electrode is located adjacent a second surface of the membrane;
- and
- applying a second bias voltage to the second electrode, wherein the second bias voltage is independent from the first bias voltage.
A method for operating a microelectromechanical system (MEMS), the method comprising:
- applying a first bias voltage to a membrane of the MEMS and a first electrode, wherein the membrane is arranged between the first electrode and a second electrode;
- and
- applying a second bias voltage to the second electrode, wherein the second bias voltage is independent from the first bias voltage,
- wherein applying the first bias voltage shifts a stiffness of the membrane from a first stiffness to a second stiffness, and
- wherein applying the second bias voltage shifts the stiffness from the second stiffness to a third stiffness.
A microelectromechanical system (MEMS) comprising:
- a first anchor region;
- a second anchor region;
- a plate electrode connected to the first anchor region and the second anchor region;
- a first electrode, the first electrode located adjacent a first surface of the plate electrode;
- and
- a second electrode, the second electrode located adjacent a second surface of the plate electrode.
Dependencies are inferred from the claim text.