Resonator device and method of optimizing a q-factor
AssigneeNXP B.V.
InventorPeter Steeneken
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Abstract
A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).
Claims15
Resonator device comprising:
- a base comprising an anchor;
- a vibration unit connected to said anchor;
- said vibration unit being configured to have a desired first vibration mode;
- and
- said vibration unit being configured to have a second vibration mode different from said first vibration mode;
- wherein the first vibration mode and the second vibration mode destructively interfere at the anchor, said vibration unit being a single plate-shaped vibration element configured to provide said first vibration mode and said second vibration mode.
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A method of optimizing a Q-factor of a resonator device comprising a vibration unit connected to an anchor, the method comprising:
- configuring said vibration unit to have a desired first vibration mode;
- and
- configuring said vibration unit to have a second vibration mode different from said first vibration mode;
- wherein the first vibration mode and the second vibration mode destructively interfere at the anchor, wherein.
- configuring a vibration unit to have a desired first vibration mode comprises configuring lateral dimensions of a plate-shaped element of said vibration unit such that said plate-shaped element has said first vibration mode in the form of an extensional mode;
- and
- configuring said vibration unit to have a second vibration mode comprises configuring a thickness of said plate-shaped element such that said plate-shaped element has said second vibration mode in the form of a flexural mode.
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Dependencies are inferred from the claim text.